Simultaneous wide-area height measurements with confocal optics and 2D measurement with 15× brightfield zoom optics.
VMZ-K3040
VMZ-K6555
XY Stroke (mm)
300×400
650×550
Magnification (Type S)
1.5× / 3× / 7.5×
1.5× / 3× / 7.5×
Magnification (Type H)
15× / 30×
15× / 30×
Z-axis Stroke (mm)
150
150
Max. guaranteed loading capacity (kg)
20
30
Max. permissible error U1X, U1Y (µm)
1.5+2.5L / 1000
1.5+2.5L / 1000
Max. permissible error of Z axis (µm)
1+L / 1000
1+L / 1000
Zoom Heads
Confocal NEXIV incorporates confocal optics for fast and accurate evaluation of fine three-dimensional geometries.
Confocal Optics are designed for wide FOV height measurement.
High Contrast and Multileveled Sample (PCBs)
Brightfield observation can sometimes be difficult due to blurred lines along sample structure. These lines can be clearly observed and measured using Confocal optics.
Thin Transparent Samples (Metal Surface Film / Semiconductor Resist)
Top layers of both thin transparent film and metal surface can be easily detected using Confocal optics.
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